Novel Cylindrical Magnetic Levitation Stage with High Precision Motion

This paper proposed novel cylindrical magnetic levitation stage. This stage can move the cylinder to rotations and translations as well as levitations with high precision in vacuum. This advantage is useful to make a nano patterning on the surface of cylindrical specimen by using electron beam lithography. In this paper, a conceptual design and a detailed design of the novel cylindrical magnetic levitation stage are shown. Firstly, mathematical modeling and simulation results are shown and then experimental results are compared after manufactured.