Precision Magnetically Suspended XY Stage
The objective of these research efforts is to analyze, design, construct, and test a precision magnetically suspended motion control stage, allowing linear travel of 50 mm in two linear directions X and Y. The proposed stage has applications in such areas as semiconductor manufacturing and biotedmology experiments. The structure of the stage, developed equations of actuator forces and some aspects of the stage optimal design are presented.
Author: A. Kuzin | Published: 1994
Booktitle: Proceedings of ISMB4
Booktitle: Proceedings of ISMB4