Electrostatic Silicon Wafer Suspension
This paper describes an experimental electrostatic silicon wafer suspension system, which is a part of pre- liminary research towards the development of contactless wafer manipulators for use in Ultra-High-Vacuum (UIIV) and ultra clean environments. A silicon wafer with 4 inch diameter has been suspended successfully without any mechanical contact by actively controlling the electrostatic attractive force acting on it.
Author: J. Jin and T. Higuchi and M. Kanemoto | Published: 1994
Booktitle: Proceedings of ISMB4
Booktitle: Proceedings of ISMB4