Micromachined Active Magnetic Bearings
A disc-shaped rotor of 8 mm diameter and 1mm thickness has been levitated and rotated up to 3000 rpm in a miniature magnetic-bearing-motor combination. The levitation type is actively controlled using an optical sensing system in two radial directions. A second rotor of 5 µm thickness and 3 mm diameter is now being built along with four miniature stator magnets using micromachining technology of read-write magnets of disc storage devices. The machining consists of lithographic and electroplating processes. The bearing will be combined with an induction motor. Possible applications could include rate gyros.
Author: H. Bleuler and H. Kawakatsu and W. Tang and W. Hsieh and D. K. Miu and Y.C. Tai and F. Moesner and M. Rohner | Published: 1994
Booktitle: Proceedings of ISMB4
Booktitle: Proceedings of ISMB4