Ultra-Pure Fluid Flowmeter For Harsh Environments
A new ultra pure fluid flowmeter for harsh envi-ronments is presented. The total sensor accuracy is 1% while the repeatability is 0.5% of full scale with a viscosity dependency of 1.5% from 1 to 30mPas. The sensor is based on active magnetic levitation. All wetted surfaces are made of polytetra-fluorethylene (PTFE), or perfluoralkoxy (PFA). Therefore it can be used in the very challenging field of semiconductor manufacturing and in the chemical industry.
Author: Daniel Schrag and Simon Huwyler and Elmar Häfliger and Jürgen Hahn and Reto Schöb and Richard Gilbert and Todd Thorson | Published: 2004
Booktitle: Proceedings of ISMB9
Booktitle: Proceedings of ISMB9